Feb 21, 2020  
2015-2016 Graduate Catalog 
    
2015-2016 Graduate Catalog [Not Current Academic Year. Consult with Your Academic Advisor for Your Catalog Year]

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CHEE 7387 - Plasma Processing: Principles and Applications

Credit Hours: 3.0 (Lecture Contact Hours:3; Lab Contact Hours:0)
Prerequisite: graduate standing in engineering or natural sciences or consent of instructor.
Principles of low pressure glow discharge plasmas: plasma generation and maintenance, plasma chemistry, plasma diagnostics. Applications with emphasis on semiconductor manufacturing.



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