May 27, 2018  
2015-2016 Graduate Catalog 
    
2015-2016 Graduate Catalog [Not Current Academic Year. Consult with Your Academic Advisor for Your Catalog Year]

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ECE 6309 - Microlithography for Micro-and Nano-system Manufacturing

Credit Hours: 3.0 (Lecture Contact Hours:3; Lab Contact Hours:0)
Prerequisite: Graduate standing and/or consent of the instructor.
Fundamental principles of microlithography: resolution limits, resist exposure and development, and modeling; electron-beam, imprint, x-ray, and ion-beam lithography.



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