Sep 27, 2020  
2012-2013 Undergraduate Catalog 
    
2012-2013 Undergraduate Catalog [Not Current Academic Year. Consult with Your Academic Advisor for Your Catalog Year]

Add to Portfolio (opens a new window)

CHEE 5387 - Plasma Processing: Principles and Applications

Cr. 3. (3-0)
Prerequisite: senior standing in engineering or natural sciences or consent of instructor.

Principles of low pressure glow discharge plasmas: plasma generation and maintenance, plasma chemistry, plasma diagnostics. Applications with emphasis on semiconductor manufacturing.



Add to Portfolio (opens a new window)