MECE 5321 - Nanoscale Design & Fabrication

Credit Hours: 3
Lecture Contact Hours: 3 Lab Contact Hours: 0

Prerequisite: ECE 5320 or CHEE 5320 or MECE 5320, concurrent enrollment in MECE 5121, or consent of instructor; all prerequisites must be completed with C- or higher.
Description
Design and fabrication at the nanoscale. Effects of nanoscale phenomena on device scaling; technological advantages and challenges. Design, fabrication, metrology, and device integration at nanoscale.
Repeatability: No

Additional Fee: Yes