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Jan 02, 2026
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ECE 5384 - Micro-Nano-Electro-Mechanical Systems and Nano DevicesCredit Hours: 3.0 Lecture Contact Hours: 3 Lab Contact Hours: 0 Prerequisite: ECE 3155 and ECE 3355 ; all prerequisites must be completed with C- or higher. Description Micro- and nano-electro-mechanical systems (MEMS/NEMS); relevant material science, physics, design, manufacturing techniqeues and operation. Applications. Repeatability: No
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