|
Dec 04, 2023
|
|
|
|
ECE 6384 - Micro-Nano-Electro-Mechanical Systems and Nano Devices Credit Hours: 3.0 Lecture Contact Hours: 3 Lab Contact Hours: 0 Prerequisite: ECE 6466 or equivalent course
Micro-and-nano-electro-mechanical system (MEMS/NEMS); relevant material science, physics, design, manufacturing techniques and operation. Applications.
Add to Portfolio (opens a new window)
|
|