Dec 12, 2025  
2013-2014 Undergraduate Catalog 
    
Catalog Navigation
  Publication Home
  Academic Calendar
  Admission Requirements
  Policies
  Colleges
  Courses
  Programs & Degrees
  University Profile
  Tuition and Fees
  Scholarships and Financial Aid
  Definition and Course Numbering
  Comments
  Disclaimer
  Archives
  My Portfolio
HELP
2013-2014 Undergraduate Catalog [Not Current Academic Year. Consult with Your Academic Advisor for Your Catalog Year]

Facebook this Page (opens a new window)
Tweet this Page (opens a new window)
Add to Portfolio (opens a new window)

CHEE 5387 - Plasma Processing: Principles and Applications

Credit Hours: 3.0 (Lecture Contact Hours:3; Lab Contact Hours:0)
Prerequisite: senior standing in engineering or natural sciences or consent of instructor.

Principles of low pressure glow discharge plasmas: plasma generation and maintenance, plasma chemistry, plasma diagnostics. Applications with emphasis on semiconductor manufacturing.


Facebook this Page (opens a new window)
Tweet this Page (opens a new window)
Add to Portfolio (opens a new window)